The 1842 census is head-of-household only.
1851/52 Canadian Census
Hillier Township, Prince Edward County, Canada West (now Ontario)
Benway, Anthony, aged 25, carriage maker, born Canada, Methodist, widower\
Benway, Albert E., aged 2, b. Canada
Albert E. Benway, aged 28, bachelor, gentleman, born Canada, of Collingwood, son of Anthony & Dorcas, married Minnie B. Hyde, aged 20, spinster, born Canada, of Owen Sound, daughter of Patrick & Joan; witnesses not named; 18 October 1877 in Windsor (Essex County).
Florence A. Benway, aged 19, born London, Ontario, of Collingwood, daughter of Anthony A. & Mary Ann, married James Smith, aged 27, born Elmira NY US, of Collingwood, carriage maker, son of Thomas Smith & Jane Coulter; witnesses: Mary Ann McClaren & Anthony A. Benway, both of Collingwood.12 May 1875 in Collingwood (Simcoe County).
Found births for children of Anthony Alexander Benway & Mary Ann Reynolds:
Charlotte, born 27 May 1870 (Simcoe County)
Ada Mary, born 23 April 1873
Charlotte, born 11 August 1875 (first baby with this name must have died)
Anthony is noted as a wagon maker so is likely the same individual as in the 1851 census with a second wife.
Name is likely a version of the French name Benoit.